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A beam type solar cell substrate transport robot is under development to meet the high demand to increase the productivity of solar cell. In order to reduce the tact time and increase the productivity, the accurate position control with vibration rejection technique becomes more important as the size of solar cell substrate becomes larger. This paper is focusing on the beam type substrate handling...
A 5 kWh class FESS (flywheel energy storage system) with the operating speed range of 9,000~15,000 rpm has been developed. The system consists of a composite flywheel rotor, active magnetic bearings, a motor/generator and its controller. Because active magnetic bearings(AMB) to support the rotor vibration are open-loop unstable, they needs a feedback controller for stable operation. Digital controller...
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