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This paper extends the experimental evidences of fatigue in micrometric structural silicon, typical of microelectromechanical systems processes, down to the submicrometric scale. The rationale lies in two naïve considerations. Fatigue is not observed at the macroscale, but becomes evident at the microscale. Thus, it should occur even more evidently at the nanoscale, where critical crack lengths decrease...
The work discusses the effects of vibrations on the performance of rate gyroscopes in terms of Allan variance, and presents the results of vibrations rejection on a Z-axis gyroscope based on piezoresistive nano-gauge sensing elements. In a comparative analysis with a consumer off-the-shelf gyroscope, the proposed device shows a 10-fold better angle random walk (ARW) under no vibrations, and at least...
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