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In the present study, we have investigated the thickness dependence of mechanical properties of the Black Diamond™ (SiOC:H, BD, Low-k) films, which are of great interest in current Cu/low-k Back End of the Line (BEOL) interconnect/packaging technologies. For this investigation the BD thin films of six different thicknesses 100, 300, 500, 700, 1,000 and 1,200 nm were deposited on the 8″ Si wafer by...
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