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The charge state distributions (CSDs) of Li, C and F ions after a single collision with Au atoms deposited as a submonolayer coverage on Si were measured at energies below 500 keV/amu and compared to the equilibrium CSDs. The influence of the surface on the charge state of the outgoing ions is demonstrated for Li ions at 3 MeV. It is found that the CSD after a single collision is generally different...
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