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TiN film has been applied for medical cutting tools to improve the mechanical properties such as surface hardness and wear resistance, and also to provide the biocompatible property of the surgical tools. TiN film has been deposited by using a plasma-assisted chemical vapor deposition system. Bipolar-pulsed DC discharge has been used for optimal plasma discharge condition, and the gas mixture of TiCl...
Fluorinated amorphous carbon (a-C:F) thin films were prepared with an electron cyclotron resonance chemical vapor deposition (ECRCVD) system using gas mixtures of C2F6 and CH4. The effects of deposition temperature on the properties of ECRCVD-prepared a-C:F films were investigated. Both the deposition rate and fluorine content of the films decrease linearly with increasing deposition temperature....
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