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This paper presents the design, the fabrication, and the performance characterization of microelectromechanical systems (MEMS) scale cantilever-type piezoelectric energy harvesters (PEHs) that utilize the piezoelectric polymer polyvinylidene fluoride-trifluoroethylene (PVDF-TrFE). Ranges are determined for device dimensions according to the calculations based on mathematical models. Designed devices...
In this paper, we elaborate on protocols for growing ZnO nanowires using different vapor deposition techniques to provide a comparative study for low temperature based deposition. Effects of various parameters ranging from process temperatures to material compositions were investigated. Growth from ZnO thin film seed layers and catalytic growth using Au nanoparticles were performed as well as growth...
We report the growth of high quality zinc oxide (ZnO) nanowires on [100] n-type silicon substrates using a physical vapor deposition (PVD) method in two sets of experiments with varying reaction temperatures (800–1200 °C) and growth durations (45 min – 60 min). The diameter of the synthesized nanowires ranged from 50–120 nm with a length of 2–7.1 µm. Nanowires had smooth surfaces with relatively uniform...
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