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The low-loss and CMOS compatible Ta2O5 based optical waveguide has been demonstrated. The quality factor of 50,000 in the Ta2O5 micro-ring resonator is fabricated. Moreover, the four-wave-mixing has been realized in the submicron Ta2O5 channel waveguide.
Nonstoichiometric Si1−xGex films fabricated by plasma enhanced chemical vapor deposition (PECVD) with different flounce ratios are demonstrated to show the composition ratio dependent optical properties, including refractive index, bandgap and optical absorption. By increasing the fluence ratio from 0.2 to 0.5, the refractive index of Si1−xGex film raises from 3.527 to 3.927, with the absorption coefficient...
Si-nanocrystal incorporated Si-rich SiOx strip-loaded waveguide amplifiers grown by detuning N2O/SiH4 fluence ratio and RF power are demonstrated with blue, yellow, and red multi-color amplified-spontaneous-emission and gain coefficients of 160, 70 and 45 cm-1.
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