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A micro-electro-mechanical-system (MEMS) based, temperature triggered, switch is developed as a cost-effective solution for smart cooling control of solid-state-lighting systems. The switch (1.0x0.4mm 2 ) is embedded in a silicon substrate and fabricated with a single-mask 3D micro-machining process. The device switches on at a designed temperature threshold (130°C) with a contact resistance...
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