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This letter presents a novel complementary metal–oxide–semiconductor (CMOS)-compatible technique to fabricate a sub-100-nm slot waveguide in wafer-scale, which is beyond the resolution limit of conventional deep ultraviolet (DUV) lithography. We also demonstrate fabrication of an efficient channel-slot coupler with an ultrasharp tip by using slanted cutting.<?Pub _bookmark Command="[Quick...
A silicon heat sink with grooved mirror was fabricated by micro-processing technology, then a 5W blue 2×2 LED array with Silicon-based heat sink was accomplished by way of studying its heat conduction. Firstly, the optical ray trace simulation of the array was carried out to study the relationship between light profile and lens shaped, groove height. Then according to the optical simulation results,...
In this paper, fabrication tolerance of two mode-coupling-based polarization rotators, slanted-angle polarization rotator and asymmetric sidewall polarization rotator, is studied and compared based on BPM and three-dimensional FDTD simulations. Optimization on both structures has achieved over 20 dB polarization extinction ratio with short rotation length. The effects of variation on rotation length,...
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