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A single-mode vertical-cavity surface-emitting laser (VCSEL) array at 850 nm with excellent performance in terms of high output power, single-lobe far-field, and narrow divergence angle has been demonstrated. By use of the Zn-diffusion process with proper sizes of oxide current-confined and Zn-diffusion optical apertures, each unit of VCSEL in the demonstrated array is highly single-mode (side-mode...
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