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A dense Al2O3 interlayer was inserted into TiN to enhance the tribological and anti-corrosion properties of TiN hard coating via a hybrid process of magnetron sputtering and atomic layer deposition (ALD). The influence of the ALD-Al2O3 layer on the microstructure, mechanical, tribological and anti-corrosion properties of TiN was examined. The TiN-Al2O3 coating exhibits low friction coefficient and...
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