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MEMs typically have moving parts that are sensitive to the environmental pressure during operation. Many types of microsystem devices need vacuum in order to operate properly. However, making a high vacuum MEMS package, which maintains this vacuum over a long time, is difficult. Sources of gas inside a MEMS package are mainly due to external leakage or in-diffusion and/or internal materials outgassing...
This paper presents a gas identification system for electronic nose inspired from the biological olfactory system. Temperature modulation is first used to virtually boost the number of sensors by periodically sampling the sensorspsila response at different temperatures. Convex tin-oxide sensor technology is used to increase the thermal efficiency of our in-house gas sensors. The response of each sensor...
This paper deals with gas recognition which has many applications in various domestic and industry tasks. We propose a new low complexity recognition method based on the measurement issued from an on chip 4 x 4 gas sensor array. The recognition system is based on a vector angle similarity measure between the query gas and the representatives of the different gas classes. The latter are obtained using...
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