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This paper describes a coplanar capacitive sensor that is developed for joule balance to measure the horizontal displacement of suspended coil. Three sensors of this type are arranged at 120° intervals around the suspended coil. This sensor shows the sensitive of 0.012pf/mm with 0μm resolution through the experiment.
To estimate the misalignment error caused by the horizontal movement of fixed coil in the Joule Balance project, a high precision measuring method based on self-alignment capacitive displacement sensor is proposed to measure the displacement of the Joule Balance in the horizontal direction. Results show that the measurement resolution can reach 1 µm.
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