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We propose an efficient microdrilling method of high-aspect-ratio, high-quality microholes in polymethyl methacrylate by controlling localized transient spatial electron density using single-pulse femtosecond laser Bessel beams. The microholes fabricated with diameters of 1.5–2.4 μm are taper-free, which are of much better quality in the entrances and sidewalls, as compared with those fabricated by...
Microholes, especially high aspect ratio, high-quality microholes with small diameters (<100 μm), have broad applications. However, it is very difficult for traditional drilling methods to obtain deep microholes, especially with aspect ratios of over 50:1. Femtosecond lasers provide a promising solution for efficient drilling of deep microholes with high-precision material removal, reduced...
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