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In this paper the effect of electrostatic forces due to applied excitation voltage on MEMS capacitive accelerometer has been presented. A set of parallel plates often termed as combs or fingers along with a proof mass and a set of spring constitute the basic structure of a capacitive accelerometer. Some of the fingers are fixed while others are movable. The proof mass moves so that the movable fingers...
In recent years, MEMS accelerometers are being used on an increasing scale in different spheres of science and technology. Proper testing and calibration of these devices is as vital as that of its design and fabrication. The present paper details with the construction of a centrifuge equipment to be used in static testing of MEMS accelerometers. This is based on a conventional rotating platform generating...
A dual axis MEMS capacitive Accelerometer with a single proof mass structure has been designed for the range of plusmn30 g. Instead of using two single axis accelerometer separately; an unique structure combining the features of two single axis accelerometer has been designed for measuring the acceleration in 'x' and 'y' axes simultaneously.
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