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Measurements of Poisson's ratio and the Young's modulus of thin films have been problematic. In this work, evaluation of both Poisson's ratio and Young's modulus is conducted using grazing incidence X-ray diffraction combined with measurement of the induced stress. Poisson's ratio was evaluated from analysis of the X-ray diffraction data to obtain a strain—cos 2 α·sin 2 ψ plot. Moreover,...
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