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This paper reports on a feasibility study of using infrared (IR) laser ablation for silicon handler debonding for the first time. Various lasers were evaluated for the transmission through a Si handler and several release layers were studied for on low-power laser ablation. Debonding of silicon handler has been successfully demonstrated. Furthermore, a test vehicle based on through-silicon-via (TSV)...
This paper presents the design and the implementation of a lighting system which is able to detect the approach of the visitors and then turn the lighting onto the normal intensity to let the exhibition be bright enough. All lightings are equipped with the energy-saving function which will turn itself to the dimming level automatically after the visitors' leaving. PIR (Passive Infrared) sensors are...
A “capacitive-piezo” transducer that separates a piezoelectric resonator from its electrodes via small gaps to eliminate resonator-to-electrode loss while maintaining strong electromechanical coupling, has enabled demonstration of a 50-MHz wine-glass disk (WGD) resonator array with Q=12,748. This is higher than exhibited by any sputtered thin-film AlN resonator measured to date at any frequency and...
Quality factors (Q's) greater than 10,000 and higher than reported for any other sputtered AlN d31-piezoelectric micromechanical resonator have been demonstrated for the first time using an energy sharing mechanical circuit that mechanically couples two electrode-equipped AlN resonators with several electrode-less ones. The key enablers behind the described Q increase are 1) removal of metal electrodes...
A new method for releasing high aspect-ratio microstructures has been demonstrated that utilizes silicidation to form gaps between movable microstructures and their substrates in substantially faster times than conventional sacrificial layer-based release methods and with much less concern for stiction or attack of unintended layers. The key enabling element is the use of a self-sufficient chemical...
Substantial improvements in the far-from-carrier phase noise of oscillators referenced to stand-alone (as opposed to arrayed) capacitively transduced micromechanical disk resonators have been attained via the use of atomic layer deposition (ALD) to tune the electrode-to-resonator capacitive gaps. Specifically, ALD of about 30 nm of hafnia (HfO2) onto the surface of a released 60-MHz micromechanical...
UHF vibrating micromechanical ring resonators with solid-filled dielectric transducer gaps (as opposed to previous air gaps) operating in a compound-(2,4) mode have been demonstrated at 979.6 MHz with Q's on the order of 3,100 and motional resistances effectively 4.7?? smaller than air gap counterparts under identical bias conditions. Due to their higher dielectric constant, substitution of solid...
A mechanical circuit-based approach for boosting the Q of a vibrating micromechanical resonator has been demonstrated whereby a low Q resonator is embedded into a mechanically-coupled array of much higher Q resonators to raise its functional Q by a factor approximately equal to the number of resonators in the array. Using this method, the low Q of 7,506 exhibited by a support-loss-limited 60- MHz...
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