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A bio-inspired dome-shape SiO2/SiN membrane-in-recess is fabricated by two subsequent wet-etching steps, continued with membrane material thin film deposition, and backside deep reactive ion etching for releasing the membrane. White light interferometer (WLI) confirmed the shape of the membrane. The middle apex of the membrane has 12 μm positive indentation from the edge, which is recessed 2-4 μm...
In this paper, a simulation model of a MEMS gyroscope is presented. The model enables mode matching and analysis of the dynamic behavior of a gyroscope. Furthermore, the model allows the optimization the design parameters of the gyroscope. The simulated gyroscope operates at a frequency of 52MHz with amplitudes of 10nm and quality factor of 50,000. Finally, the drive mode measurements are presented...
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