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This paper deals with the surface flashover characteristics of dielectric material during electron beam irradiation in vacuum in order to design the conductive patterns on printed circuit boards used inside a spacecraft adequately. The dielectric material and the electrodes printed on it were irradiated with electrons of the energy of 3-10keV. DC high voltage was applied between the two electrodes...
This paper elucidated for the first time that titanium (Ti) is an excellent barrier metal (BM) material from the stand point of cost and performance, especially for the porous low-k ILD materials. Both stress induced voiding (SIV) suppression and one order longer electromigration (EM) lifetime were obtained by introducing Ti instead of the conventional tantalum (Ta). It has been considered that the...
A key technology for realizing an effective k-value (keff) required for 45nm node is proposed. We studied the behavior of effective dielectric constant derived from capacitance of double-level copper interconnect wires with porous low-k material in detail. The porous low-k materials easily absorb moisture due to process damage and the dielectric constant drastically increases. We have confirmed that...
Summary form only given. Strontium titanate (SrTiO/sub 3/) is a typical dielectric material with perovskite-type structure. The crystal structure is cubic above T/sub c/=105 K, where SrTiO/sub 3/ undergoes structural phase transition at zone boundary. Below T/sub c/, the crystal structure changes into tetragonal with keeping a center of symmetry. Strong electron phonon coupling is expected from the...
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