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In this article, we report an extensive study of mass density variations with increasing thickness of many nanofilms (Al, AlN, Cr, Cu, SiC, SiO2, Si3N4 and ZnO) deposited on several substrates (MgO, quartz and stainless steel). From, the analysis and the results quantification, it was found that the mass-density dependence showed dispersive behaviours: increasing layer thickness leads to an initial...
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