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In this study, we evaluated the influence of photoresist–water contact time on the quantity of the photoacid generator (PAG) leached from photoresists into pure water and alteration of the photoresist composition using LC–MS, XPS, and TOF-SIMS, by employing exposed and unexposed photoresists. As a result, the quantity of PAG leached into pure water increased as the contact time elapsed. Then, it was...
We have found a new formation procedure of nano-tips, namely field-enhanced diffusion-growth (FDG) method. This method has the advantage of forming the nano-protrusion at room temperature, which is quite different from the conventional method by Binh et al. With field ion microscope, we confirmed that the tip was terminated with either a few atoms or the less in the end. The field emission (FE) electrons...
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