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In this paper, we studied the wave propagation in a piezoelectric layered plate consisting of a piezoelectric thin film on an electroded elastic substrate with or without a driving electrode. Both plane-strain and anti-plane waves were taken into account for the sake of completeness. Numerical results on dispersion relations, cut-off frequencies and vibration distributions of selected modes were given...
In this paper, we consider the sandwich structure composed of silicon substrate, piezoelectric layer and electrode layers in the typical structure of FBAR. We assume a special solution in the form of harmonic wave in the piezoelectric layer, and substitute it into the simplified stress equations of motion and the charge equation of electrostatic. A correction to the solution assumed is obtained in...
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