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In this paper, simulation model for the response time of micro flow sensor using COMSOL Multiphysics is presented. The detailed structure of the micro flow sensor chip is considered in the simulation model. What's more, the temperature dependencies of physical properties of air are defined to improve the model precision. The model takes into consideration the transient conduction and convection between...
In this paper, simulation model for the response time of micro flow sensor using COMSOL Multiphysics is presented. The detailed structure of the micro flow sensor chip is considered in the simulation model. What's more, the temperature dependencies of physical properties of air are defined to improve the model precision. The model takes into consideration the transient conduction and convection between...
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