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This paper describes the use of a general purpose modified simulator, first developed by K. Hashimoto to determine a priori the device responses of the specify Pt/LGS Y-X structure. The parameters for the analysis are determined as a function of the electrode type (physical constants, thickness) and substrate. The simulation responses are analyzed and compared to the experimental results and we should...
The authors have already presented a novel surface acoustic wave device for vacuum pressure measurement by employing a piezoelectric substrate that has a high value of temperature coefficient of frequency. Frequency-shift measurements as a function of vacuum pressure can be used to extract information about the pressure sensitivity of the device. In this paper, we report that the deposition of an...
In this paper we present a new experimental set-up leading to characterize SAW sensor properties in high temperature up to 900degC. The characterization method consists in hanging a small piece of self-warming piezoelectric SAW device in a vacuum chamber. The device is made of the piezoelectric material to be tested equipped with its IDT plus a heating resistance, both in Platinum. The whole system...
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