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A new kind of surface acoustic wave (SAW) sensor has been developed to measure sub-atmospheric pressure below 100 mtorr with accuracy better than 0.1 mtorr. It provides an efficient measuring solution in the pressure range inaccessible in past by conventional diaphragm-based SAW sensors. Indeed, because of the small bending force in lower pressure and limited sensitivity, diaphragm-based SAW sensors...
A new kind of surface acoustic wave (SAW) sensor has been developed in order to measure sub-atmospheric pressure below 100 mTorr with accuracy better than 0.1 mTorr. It provides an efficient measuring solution in a pressure range inaccessible in past by conventional diaphragm-based SAW sensors. Indeed, due to the small bending force in low pressure and limited sensitivity, diaphragm-based SAW sensors...
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