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This paper describes the use of a general purpose modified simulator, first developed by K. Hashimoto to determine a priori the device responses of the specify Pt/LGS Y-X structure. The parameters for the analysis are determined as a function of the electrode type (physical constants, thickness) and substrate. The simulation responses are analyzed and compared to the experimental results and we should...
This work is oriented on the used of effective simulation tools to design high temperature SAW sensor. Physical constants of platinum and LGS and related temperature coefficients recently determined were implemented in FEM/SDA program. Plessky's parameters of the Pt/LGS structure were extracted for various temperatures and injected in COM software to calculate frequency response of SAW devices. A...
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