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Pad flattening ratio (PFR) was investigated as a non-destructive pad surface analysis method on the IC1000 K-groove pad during silicon dioxide chemical mechanical planarization. The PFR defines as the ratio of the bright area to the total image area. A series of marathon polishing runs were performed under ex-situ diamond disc pad conditioning, ex-situ high-pressure micro jet (HPMJ) pad conditioning...
Distribution of delta-doped Sb atoms in a Si1−xGex layer was studied by using a new method combining chemical treatment and inductively-coupled-plasma mass spectrometry, and thermal diffusion of the Sb atoms was studied by secondary-ion mass spectrometry (SIMS). The delta doping was performed as follows: First, 0.1-monolayer Sb atoms were deposited on Si1−xGex surfaces and embedded by evaporating...
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