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In this paper, microplasma is investigated, which occurs between the narrow gap of the electrodes covered with dielectric materials. The discharge gap is set on the order of micrometers by changing a spacer from 0 to 100 mum. In this paper, the characteristics of microplasma, such as discharge voltages, discharge currents, and discharge power that is obtained with the help of Lissajous figures, and...
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