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A novel SAW flow sensor is proposed based on pressure measurement. The relationship between the flow rate and the pressure difference along the flow path is evaluated. The results show a linear relationship between the flow rate and pressure difference, which agrees with the past research results. Strain analysis and FEM simulation show that phase delay depends linearly on the flow rate passing the...
A novel surface acoustic wave flow sensor is studied in this paper. ST-X cut quartz SAW delay line device is chosen for its ultra-high temperature stability. Test chamber is designed and built using acrylic plate and the SAW device is mounted on the chamber wall. Test Results show that SAW flow sensor has a linear relationship between the passing flow rate and system phase delay. The system has a...
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