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We have developed anisotropically etched low-loss artificial dielectric birefringent quarter-wave plates (QWPs) for use at 1.5 and 2.8 THz. The grating period for both QWPs is 20 ??m. We etched 46- and 30- ??m-deep gratings to obtain a ??/2 phase retardance between transverse-magnetic and transverse-electric polarization propagating through the QWPs at 1.5 and 2.8 THz, respectively. A SU8 antireflection...
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