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We have developed the ultra-thin MEMS mirror device. The thickness of the mirror device is 5.31 μm including Si structures and actuators. The mirror device was fabricated using SOI wafer on which Pt/SRO/PZT/SRO/Pt/Ti/SiO2 were deposited. The device was bonded on a flexible polyimide substrate and wired using adhesion passed and conductive paste. The mirror device was operated on the bent substrate.
In this paper, we propose a simple slider-crank mechanism using flexible links, which realizes both a wide flapping angle and lead-lag motion for a small flapping robot. Butterfly-style flight is promising because of its low flapping frequency and few degrees of freedom, unlike the flights of flies and dragonflies. However, since a butterfly flaps its wings over 140 deg and claps both left and right...
In this study, we manufactured small butterfly-style flapping robots with wing veins and investigated their flight characteristics for different design parameters such as swept-forward wing angle and center of mass (COM). The butterfly-style flapping robot is characterized by a total mass of less than 1 g, the COM at its rear, a tailless wing, a few degrees of freedom (DOF), a low aspect ratio, a...
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