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We describe strategies for fabricating strong-confinement microring filters and circuits, and assert that techniques specifically tailored to microphotonics requirements provide a more efficient path to commercialization than techniques developed for semiconductor electronics.
We review major developments that have led to a high performance, polarization independent, microphotonic circuit. The design and fabrication of complex high-order microring-resonators, along with techniques to freely manipulate polarization states on-chip are presented.
Add-drop filters based on microring resonators were fabricated in silicon-rich silicon nitride. Third-order microring filters showed an 80 GHz bandwidth, a 4 dB loss from input to drop, and a 24 nm free spectral-range.
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