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An in-plane silicon-on-insulator (SOI) MEMS-tunable Fabry-Perot microcavity filter is presented, in which one distributed Bragg reflector (DBR) mirror is attached to a doubly-clamped suspended beam resonator. We improve upon previous designs by utilizing a silicon waveguide cavity instead of an air cavity. The design eliminates a significant source of optical loss (beam divergence) leading to improved...
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