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Vertical comb drives are critical for electrostatic optical switches and variable optical attenuators (VOAs), but fabricating vertical comb-drives suffers from the difficulty of dealing with the comb-finger misalignment. This paper presents a vertical comb drive design and its micro-fabrication method that can realize self-aligned two-level comb fingers. The self-aligned vertical comb fingers are...
A mechanism for achieving large in-plane displacement is proposed, fabricated and tested. A key distinguishing feature of this mechanism is that it employs bimorph actuator beams, which have traditionally been used for achieving out-of-plane displacements only. A combination of rigid beams and bimorphs amplifies in-plane displacements and minimizes out-of-plane displacements produced by the bimorphs...
We report a miniature mirror-tilt-insensitive (MTI) Fourier transform spectrometer. A large-vertical-displacement (LVD) MEMS mirror is used to generate large scan range for high spectral resolution. The LVD MEMS mirror is also reflective on both surfaces. The maximum tilting angle of the MEMS mirror is 1.7deg for its entire 1-mm scan range. The combination of a corner-cube retroreflector and dual-reflective...
We report a novel dual-reflective MEMS mirror for full-circumferential-scanning (FCS) (360deg), forward-view endoscopic imaging applications. A unique electrothermal dual-folded-bimorph (DFB) actuator that can generate large rotation angles with a stationary rotation axis is employed. The fabricated devices demonstrate over 90deg mechanical rotation angles at frequencies up to 60 Hz with driving voltages...
We report a lateral-shift-free (LSF) large-vertical-displacement (LVD) microlens scanner for tunable focusing applications such as confocal microscopy. A polymer microlens is integrated into a lens holder actuated by a LSF-LVD microactuator. The focal plane of the microlens can be vertically displaced 0.7 mm at only 7.5 V. The observed maximum lateral shift and tilt of the microlens during the entire...
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