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As a new application of MEMS to hard disk drives, gimbal-chip (a MEMS chip that replaces suspension's gimbal function) was investigated. A micro-actuator for tracking servo was also integrated in the chip. Design, process, and performance of the chip are reported.
A microactuator that moves the slider of a hard disk drive (HDD) was fabricated using MEMS techniques. A suspension-mounted PZT milliactuator was also manufactured. Both actuators were assembled and tested in 10,000 RPM server-class HDDs. The MEMS microactuator has a resonance at 2.2 kHz that can be controlled by feedback, and has virtually no other modes up to 100 kHz. The first mode of the PZT milliactuator...
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