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The effect of sputtering pressure on the growth behavior of heteroepitaxial ZnO films grown by radio-frequency magnetron sputtering on SrTiO 3 (STO) (001) substrates was investigated. Columnar growth of ZnO films at a growth pressure of 3×10 −2 Torr was observed, while typical planar growth was dominant at lower growth pressures. This can be explained by the complicated interplay between...
This paper reports synthesis and characterization of self-assembled ZnO hexagonal nano-disks grown by radio-frequency magnetron sputtering. X-ray diffraction data and scanning electron microscopy data show that ZnO hexagonal nano-disks are nucleated on top of the flat surfaces as the film thickness reaches 1.56μm and then the number of nano-disks increases with the film thickness. The lateral size...
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