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Accelerometers based on thermal convection use a tiny bubble of heated air and pairs of temperature sensors hermetically sealed inside the sensor package cavity. In this paper, we successfully design and fabricate a novel thermal-bubble-based micromachined accelerometer with the advantages of minimized solid thermal conductance and higher sensitivity. The proposed accelerometer consists of a microheater...
In this paper, we design and fabrication a novel thermal-bubble-based micromachined accelerometer with advantages of minimum solid thermal conductance and high sensitivity successfully. It can detect two-dimension acceleration changed and apply to technology of inclinometers, anemometers and flow meters. A new accelerometer consists of a micro heater and two pairs of thermopiles floating over an etched...
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