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Structural and optical properties of quantum dots fabricated using diblock copolymer lithography and selective MOCVD growth are reported. Tensile-strained (InxGa1-xAs) and compressively-strained (InAs) QDs on InP exhibit luminescence near 1.4 and 2.1 μm respectively.
A surface-micromachined compact microheater for gas sensing applications fabricated on a silicon substrate is presented. The heater was fabricated with a compatible CMOS process and its membrane was released using XeF2 isotropic silicon etching. The membrane had SiO2/SixNy/SiO2 layers (0.4/0.3/0.3 mum) in order to restrict the initial stress after the release, resulting in less than 2.5 mum height...
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