The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
With the feature size shrinkage in advanced technology nodes, the modeling of process variations has become more critical for troubleshooting and yield enhancement. Misalignment among equipment tools or chambers in process stages is a major source of process variations. Because a process flow contains hundreds of stages during semiconductor fabrication, tool/chamber misalignment may more significantly...
Focusing on the challenges of wafer fabs with multiple tools and high-mix products, this study aims to propose a decision-based virtual metrology framework to reduce the metrology cost and enhance productivity. An empirical study was conducted in a leading semiconductor company in Taiwan to validate the effectiveness of proposed approach for controlling overlay errors in lithography processes while...
Scheduling for wafer fabrication of advanced technology nodes entails complicated constraints such as limited waiting times. Focusing on real settings, this paper aims to develop a novel genetic algorithm of multi-subpopulation parameters with hybrid estimation of distribution (MSPHEDA) to solve the present problem effectively and efficiently. To estimate the validity of this approach, ten scenarios...
This paper considers a semiconductor manufacturing scheduling problem (SMSP), subjected to all the practical constraints such as limited waiting time, machine status, different process time on different machines, setup time and arrival time in wafer fabrication facilities (fabs) of semiconductor manufacturing industry. A hybrid estimation of distribution algorithm with multiple subpopulations (HEDA-MS)...
Inventory management is challenging and critical problem in the semiconductor memory manufacturing industry. Rapid technological development and short product life cycle cause a high risk of product obsolescence. However, manufacturers must still hold a reasonable level of inventory to satisfy the needs of customers when demand is uncertain and lead times are long. In this study, the needs and constraints...
Due to increases in the complexity of processes involved in semiconductor manufacturing, increasingly high inspection costs associated with defective wafers has become a critical concern of modern manufacturers. More importantly, because of high-dimensional wafer bin maps (WBMs), it is difficult to capture the variations of each dimension via traditional pattern recognition or classification methods...
• Through the proposed method, the streamlined high-priority lots can be obtained with maximum information coverage and best KPI, and the model has good ability of abnormal discrimination. • Cost reduction by catching more abnormal events • Decreasing business impact to improve customer's satisfaction
The discipline of industrial engineering has been declining in many countries in light of the changes of industry structures in developed countries, in which the competition is no longer among individual companies while the collaboration among horizontally specialized value providers are critical for the success of the individual companies as well as the whole supply chain. There should be a systematic...
Statement of Financial Accounting Standards (SFAS) No.10 has been declared as accounting principle for allowance for reduction of inventory to market in Taiwan since December 31, 2008. It has become more difficult for semiconductor integrated device manufacturers, using make-to-stock manufacturing strategy and possessing inventory accounting for about 14% total costs, to maintain robust records in...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.