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Electromagnetic stirring (EMS) systems have been extensively used in the continuous casting process in steel-making industries to produce high-quality steel products. Although the operational principles of such EMS facilities are well established and extensively applied, demonstrations of actual stirring effects on molten metal are always desired for comparative investigations. To fulfill the requirements...
For supplying adequate driven force with high operational precision in semiconductor manufacturing industry, construction of a low cost device that can be integrated with the micro-electromechanical system (MEMS) fabrication scheme has been investigated. With both the degraded material property after electroplating process and the geometric constraints of MEMS constructions being considered, magnetic...
For supplying adequate driven force with high operational precision in semiconductor manufacturing industry, construction of a low cost device that can be integrated with the micro-electromechanical system (MEMS) fabrication scheme has been investigated. With both the degraded material property after electroplating process and the geometric constraints of MEMS constructions being considered, magnetic...
To provide a low cost driven force with high operational precision in semiconductor manufacturing industry, a micro axial flux switched-reluctance motor (muA FSRM) that can be integrated with the microelectromechanical system (MEMS) fabrication scheme has been designed and investigated. With both the degraded material property after electroplating process and the geometric constraints of MEMS constructions...
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