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Laser-induced fluorescence (LIF) has been used to examine behaviors of the CF 2 radicals and O atoms in oxygen/fluorocarbon plasmas by utilizing a magnetic neutral loop discharge (NLD), which is characterized by the efficient plasma production around the neutral loop, ‘NL region’. It was found that, in a pure CF 4 plasma, the radial profile of CF 2 density near the NL region...
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