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Implementation of thick Cu inductor in IC chips has been a highly challenging task for Far-backend packaging industry. One of the major concerns is that the thicker Cu trace wrapped by re-passivation polymer layers (Polymer-1 & Polymer-2) is often accompanied by remarkable internal stress in the overall package, which is plagued with the risk of layer-to-layer delamination and/or interface micro-cracks...
While models for conductivity in the terahertz regime are improving, there is limited data on the effects of submicrometer roughness features on conductivity. We present direct measurements of the effective conductivity of samples with periodic controlled roughness features using an open quasi-optical resonator at 400 and 650 GHz. The empirical results are compared with two closed-form models and...
A high-quality-factor quasi-optical resonator operating at 650 GHz is used to measure the conductivity of mechanically roughened metal surfaces. The results explore the effective conductivity of metals in the terahertz regime when the surface roughness is on the order of the skin depth.
A high-Q quasi-optical resonator is used to experimentally measure metal samples with controlled nano-scale textures at 400 GHz and 650 GHz. The results explore the effect of surface roughness on effective conductivity in the terahertz regime.
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