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This paper will first discuss intrinsic advantages of high-pressure oxidation of Ge and then present further improvement of electron mobility in Ge n-MISFET using high-k gate stacks combined with high-pressure oxidation. The peak mobility is about 1500 cm2/Vsec, which is the highest one to date among unstrained Si and Ge MISFETs. Ge-CMOS is a strong candidate for beyond Si-CMOS.
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