The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
A measurement system was newly developed to evaluate the mechanical properties of micro-sized materials at very low temperature ranging from -130°C to room temperature, using liquid nitrogen cooling. In this work, we conducted the fracture toughness tests of single crystal silicon films with thicknesses of about 1 μm at low temperature and found the temperature dependence on the fracture toughness,...
This paper reports the mechanical properties of silicon carbide (SiC) films at elevated temperatures up to 500degC. Poly-crystalline SiC film (poly-SiC) was deposited by LPCVD on a silicon wafer and patterned into a free-standing specimen on an "on-chip" tensile test device. The fracture strength of poly-SiC films showed little temperature dependence over the test temperature range. The...
We developed a quasi-static tensile test system that controls environmental conditions, such as pressure, temperature, and surrounding gasses. Using this system, we evaluated the fracture properties of micron- and submicron-thick single-crystal-silicon film under several conditions. The strength of silicon measured in vacuum or helium was slightly higher than that in laboratory air. We measured the...
In order to improve the reliability of Micro-electro-mechanical Systems (MEMS) designs, evaluations of the mechanical properties of soft magnetic materials are needed. In this paper, we present a tensile testing method to characterize the mechanical properties of microscale electroplated permalloy (80 wt% Ni, 20 wt% Fe) films. The gauge section of the specimen is 50 mum wide, 100 long and 5 mum thick...
Uniaxial tensile testing of single-crystal silicon film was carried out on a silicon chip. A tensile testing system was integrated on a silicon chip. A process for fabricating a test chip containing a specimen whose tensile axis has an arbitrary orientation was developed. The mechanical properties, such as elastic modulus and fracture strain, of silicon films having different orientations of (100),...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.