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This paper presents a novel concept for the realization of RF-MEMS switched capacitors. The proposed device uses a tilting metal beam combined with a non-linear electrostatic force generated by a DC voltage to maintain the device in two stable mechanical positions. Fabricated devices with relatively simple processing exhibit very low loss and a capacitive contrast of 8.5. Actuation requires only voltage...
RF-MEMS are allowing the practical fabrication of high Q tunable elements, such as tuners filters, or cavities. The MEMS capacitor can be switched between 14 fF and 4 fF, with a very low series resistance. Significant contrast could be obtained with extremely low value capacitances, and low series resistance.
This paper presents results on high lifetime RF microelectromechanical (RF-MEMS) dielectricless capacitive switches. Using air gap variation only, these RF MEMS capacitive switches achieve a capacitance ratio of 9, associated with small residual charging. The reliability of the switch has been studied, pull-in and pull-out voltages shifts have been observed, modeled and validated with good agreement...
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