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The influence of atmosphere on capacitive RF-MEMS switches is studied. It is shown that ambient atmosphere not only induces an incremental effect on the degradation of MEMS switches but also completely changes the charging mechanism of the dielectrics, directly linked with RF-MEMS reliability behaviour of MEMS switches reliability. Operating RF-MEMS switches in a dry environment changes the mechanism...
It has been shown that the use of two dielectric crystals with opposite temperature coefficient of permittivity allows the realization of a resonator with a zero temperature coefficient of frequency. By using sapphire and rutile materials, which have low-loss tangents, some compensated resonators with very high Q-factors have been realized. In this work we develop rules that greatly simplify the design...
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