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This paper presents the design and fabrication of fast DMTL RF MEMS phase shifters. Distributed MEMS Transmission Lines are being used with miniature RF MEMS switched capacitors (40times40 mum2), actuating at 25 V with a switching time around 1 mus. Both 90 and 180 degree phase shifters presented here operate at 20 GHz, are respectively less than 4.5 mm and 8.5 mm long. They are designed with 6 and...
This paper presents the effects of residual charging in dielectric less actuators of RF-MEMS ohmic switches. Indeed, in order to strongly reduce component sensitivity to charging, a dielectric less electrostatic actuator has been introduced in a conventional DC contact series MEMS relay design, resulting both in strong improvement in reliability and preservation of its intrinsic RF performance. Under...
We present the integration of deformable micro-mirror in switchable optical systems. The goal is to associate laser optics with the high and inexpensive replication of MEMS to create compact laser sources delivering intense pulsed radiation
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