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Electrostatic transducers require an electrically insulating structure between their electrodes. In state-of-the-art transducers, such as capacitive (micromachined) ultrasonic transducers (CUTs, CMUTs), this insulating structure is the main limiting factor in terms of device reliability (electrical breakdown, parasitic charging effects) and device performance (thin gap devices with low parasitic capacitance)...
Electrostatic transducers are usually operated under a DC bias below their collapse voltage. The same scheme has been adopted for capacitive micromachined ultrasonic transducers (cMUTs). DC bias deflects the cMUT membranes toward the substrate, so that their centers are free to move during both receive and transmit operations. In this paper, we present time-domain, finite element calculations for...
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