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The article reports on the effect of the addition of copper in the Al 2 O 3 film on its mechanical and optical properties. The Al–Cu–O films were reactively co-sputtered using DC pulse dual magnetron in a mixture of Ar+O 2 . One magnetron was equipped with a pure Al target and the second magnetron with a composed Al/Cu target. The amount of Al and Cu in the Al–Cu–O film was...
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