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Three boundary integral equation (BIE) formulations are investigated for the analysis of electrostatic fields exterior to thin-beam structures as found in some micro-electro-mechanical systems (MEMS). The three BIE formulations are: (1) the regular BIE using only the single-layer potential; (2) the dual BIE (a) using the regular BIE on one surface of a beam and the gradient BIE on the other surface;...
Microelectromechanical system (MEMS) is naturally continuing its downsizing into nanoelectromechanical system (NEMS), but at the same time it is indispensable in the package equipment used for nano-devices packaging in NEMS manufacture. A novel dual-grating macro-micro driven high speed precision XY-stage positioning system is presented in this paper. Combining macro with micro actuator, a system...
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